Other materials
Compared to traditional methods, femtosecond lasers with their very short pulse durations offer superior precision. Complex 3D structures as well as non-conventional shapes can be obtained.
Femtosecond laser cutting of FZ-Si wafer
The production of complex and customized optoelectronic devices and components often necessitates specifically shaped and milled chips. Traditional mechanical approaches usually end up in having limitations. They are restricted in shape due to the material’s tendency to cleave along specific crystallo- graphic directions, and they offer limited control over the process. Femtosecond lasers have pushed the boundaries in terms of smaller features, higher processing efficiency, and enhanced processing resolution compared to laser sources with longer pulse durations.
Float zone silicon wafer (FZ-Si (100), 0.4 mm thickness) was processed with FemtoLux 30 resulting in high processing quality – low heat affected zone and absence of damage on the bottom surface.